--Ar on Al2O3--
Data for 1000eV same as in Figure 6


ion energy 500eV
electron energy (eV)	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
-11.13333	0	0	8.01022E-4
-10.46667	0	0	9.20702E-4
-9.8	0	0	0.00105
-9.13333	0	0	0.00119
-8.46667	0	0	0.00134
-7.8	0	0	0.0015
-7.13333	0	0	0.00167
-6.46667	0	0	0.00184
-5.8	0	0	0.00202
-5.13333	0	0	0.0022
-4.46667	0.02898	0	0.00238
-3.8	0.04205	0	0.00255
-3.13333	0.05803	0	0.00273
-2.46667	0.07711	0	0.00289
-1.8	0.09946	0	0.00304
-1.13333	0.12487	0	0.00318
-0.46667	0.13977	0	0.00331
0.2	0.14664	0.00239	0.00342
0.86667	0.14766	0.00931	0.00352
1.53333	0.14345	0.01443	0.00361
2.2	0.13426	0.01766	0.00366
2.86667	0.12018	0.01892	0.00371
3.53333	0.10125	0.01817	0.00376
4.2	0.07742	0.01536	0.00377
4.86667	0.04867	0.01046	0.00379
5.53333	0.01492	0.00342	0.00382
6.2	0	0	0.00382
6.86667	0	0	0.00383
7.53333	0	0	0.00387
8.2	0	0	0.00389
8.86667	0	0	0.00394
9.53333	0	0	0.00402
10.2	0	0	0.00412
10.86667	0	0	0.00425
11.53333	0	0	0.00443
12.2	0	0	0.00465
12.86667	0	0	0.00493
13.53333	0	0	0.00526
14.2	0	0	0.00565
14.86667	0	0	0.0061
15.53333	0	0	0.00661
16.2	0	0	0.00718
16.86667	0	0	0.0078
17.53333	0	0	0.00847
18.2	0	0	0.00919
18.86667	0	0	0.00995
19.53333	0	0	0.01074
20.2	9.20777E-5	3.32043E-5	0.01154
20.86667	0.00175	6.34504E-4	0.01236
21.53333	0.00552	0.00202	0.01317
22.2	0.01148	0.00423	0.01396
22.86667	0.01969	0.00729	0.01472
23.53333	0.0302	0.01125	0.01544
24.2	0.04307	0.01613	0.0161
24.86667	0.05836	0.02198	0.01669
25.53333	0.07613	0.02881	0.01721
26.2	0.09642	0.03667	0.01763
26.86667	0.11931	0.04559	0.01795
27.53333	0.13582	0.05213	0.01817
28.2	0.14171	0.05462	0.01828
28.86667	0.14158	0.05479	0.01828
29.53333	0.13655	0.05305	0.01817
30.2	0.12715	0.04959	0.01794
30.86667	0.11369	0.0445	0.01761
31.53333	0.09634	0.03785	0.01718
32.2	0.07524	0.02966	0.01665
32.86667	0.05046	0.01995	0.01604
33.53333	0.02204	0.00874	0.01535
34.2	0	0	0.0146
34.86667	0	0	0.0138
35.53333	0	0	0.01296
36.2	0	0	0.0121
36.86667	0	0	0.01122
37.53333	0	0	0.01034
38.2	0	0	0.00947
38.86667	0	0	0.00861
39.53333	0	0	0.00779
40.2	0	0	0.00699
40.86667	0	0	0.00624
41.53333	0	0	0.00554
42.2	0	0	0.00488
42.86667	0	0	0.00427
43.53333	0	0	0.00372
44.2	0	0	0.00321
44.86667	0	0	0.00276
45.53333	0	0	0.00236
46.2	0	0	0.002
46.86667	0	0	0.00168
47.53333	0	0	0.0014
48.2	0	0	0.00116
48.86667	0	0	9.52121E-4
49.53333	0	0	7.72068E-4
50.2	0	0	6.1746E-4
50.86667	0	0	4.85005E-4
51.53333	0	0	3.72883E-4
52.2	0	0	2.79843E-4
52.86666	0	0	2.24081E-4
53.53334	0	0	1.4301E-4
54.2	0	0	9.52837E-5
54.86666	0	0	7.53717E-5
55.53334	0	0	3.2545E-5
56.2	0	0	1.46449E-5
56.86666	0	0	1.14737E-5
57.53334	0	0	0
58.2	0	0	0
58.86666	0	0	0
59.53334	0	0	0
60.2	0	0	0
60.86666	0	0	0
61.53334	0	0	0
62.2	0	0	0
62.86666	0	0	0
63.53334	0	0	0
64.2	0	0	0
64.86666	0	0	0
65.53334	0	0	0
66.2	0	0	0
66.86666	0	0	0
67.53334	0	0	0
68.2	0	0	0
68.86666	0	0	0
69.53334	0	0	0
70.2	0	0	0
70.86666	0	0	0
71.53334	0	0	0
72.2	0	0	0
72.86666	0	0	0
73.53334	0	0	0
74.2	0	0	0
74.86666	0	0	0
75.53334	0	0	0
76.2	0	0	0
76.86666	0	0	0
77.53334	0	0	0
78.2	0	0	0
78.86666	0	0	0
79.53334	0	0	0
80.2	0	0	0
80.86666	0	0	0
81.53334	0	0	0
82.2	0	0	0
82.86666	0	0	0
83.53334	0	0	0
84.2	0	0	0
84.86666	0	0	0
85.53334	0	0	0
86.2	0	0	0
86.86666	0	0	0
87.53334	0	0	0
88.2	0	0	0
88.86666	0	0	0
89.53334	0	0	0
90.2	0	0	0
90.86666	0	0	0
91.53334	0	0	0
92.2	0	0	0
92.86666	0	0	0
93.53334	0	0	0
94.2	0	0	0
94.86666	0	0	0
95.53334	0	0	0
96.2	0	0	0
96.86666	0	0	0
97.53334	0	0	0
98.2	0	0	0
98.86666	0	0	0
99.53334	0	0	0
100.2	0	0	0
100.86666	0	0	0
101.53334	0	0	0
102.2	0	0	0
102.86666	0	0	0
103.53334	0	0	0
104.2	0	0	0
104.86666	0	0	0
105.53334	0	0	0
106.2	0	0	0
106.86666	0	0	0
107.53334	0	0	0
108.2	0	0	0
108.86666	0	0	0
109.53334	0	0	0
110.2	0	0	0
110.86666	0	0	0
111.53334	0	0	0
112.2	0	0	0
112.86666	0	0	0
113.53334	0	0	0
114.2	0	0	0
114.86666	0	0	0
115.53334	0	0	0
116.2	0	0	0
116.86667	0	0	0
117.53333	0	0	0
118.2	0	0	0
118.86667	0	0	0
119.53333	0	0	0
120.2	0	0	0
120.86667	0	0	0
121.53333	0	0	0
122.2	0	0	0
122.86667	0	0	0
123.53333	0	0	0
124.2	0	0	0
124.86667	0	0	0
125.53333	0	0	0
126.2	0	0	0
126.86667	0	0	0
127.53333	0	0	0
128.2	0	0	0
128.86667	0	0	0
129.53333	0	0	0
130.2	0	0	0
130.86667	0	0	0
131.53333	0	0	0
132.2	0	0	0
132.86667	0	0	0
133.53333	0	0	0
134.2	0	0	0
134.86667	0	0	0
135.53333	0	0	0
136.2	0	0	0
136.86667	0	0	0
137.53333	0	0	0
138.2	0	0	0
138.86667	0	0	0
139.53333	0	0	0
140.2	0	0	0
140.86667	0	0	0
141.53333	0	0	0
142.2	0	0	0
142.86667	0	0	0
143.53333	0	0	0
144.2	0	0	0
144.86667	0	0	0
145.53333	0	0	0
146.2	0	0	0
146.86667	0	0	0
147.53333	0	0	0
148.2	0	0	0
148.86667	0	0	0
149.53333	0	0	0
150.2	0	0	0
150.86667	0	0	0
151.53333	0	0	0
152.2	0	0	0
152.86667	0	0	0
153.53333	0	0	0
154.2	0	0	0
154.86667	0	0	0
155.53333	0	0	0
156.2	0	0	0
156.86667	0	0	0
157.53333	0	0	0
158.2	0	0	0
158.86667	0	0	0
159.53333	0	0	0
160.2	0	0	0
160.86667	0	0	0
161.53333	0	0	0
162.2	0	0	0
162.86667	0	0	0
163.53333	0	0	0
164.2	0	0	0
164.86667	0	0	0
165.53333	0	0	0
166.2	0	0	0
166.86667	0	0	0
167.53333	0	0	0
168.2	0	0	0
168.86667	0	0	0
169.53333	0	0	0
170.2	0	0	0
170.86667	0	0	0
171.53333	0	0	0
172.2	0	0	0
172.86667	0	0	0
173.53333	0	0	0
174.2	0	0	0
174.86667	0	0	0
175.53333	0	0	0
176.2	0	0	0
176.86667	0	0	0
177.53333	0	0	0
178.2	0	0	0
178.86667	0	0	0
179.53333	0	0	0
180.2	0	0	0
180.86667	0	0	0
181.53333	0	0	0
182.2	0	0	0
182.86667	0	0	0
183.53333	0	0	0
184.2	0	0	0
184.86667	0	0	0
185.53333	0	0	0
186.2	0	0	0
186.86667	0	0	0
187.53333	0	0	0
188.2	0	0	0

ion energy 800eV
electron energy (eV)	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
-11.13333	0	0	8.01022E-4
-10.46667	0	0	9.20702E-4
-9.8	0	0	0.00105
-9.13333	0	0	0.00119
-8.46667	0	0	0.00134
-7.8	0	0	0.0015
-7.13333	0	0	0.00167
-6.46667	0	0	0.00184
-5.8	0	0	0.00202
-5.13333	0	0	0.0022
-4.46667	0.02898	0	0.00238
-3.8	0.04205	0	0.00255
-3.13333	0.05803	0	0.00273
-2.46667	0.07711	0	0.00289
-1.8	0.09946	0	0.00304
-1.13333	0.12487	0	0.00318
-0.46667	0.13977	0	0.0033
0.2	0.14664	0.00239	0.00341
0.86667	0.14766	0.00931	0.00349
1.53333	0.14345	0.01443	0.00355
2.2	0.13426	0.01766	0.00359
2.86667	0.12018	0.01892	0.0036
3.53333	0.10125	0.01817	0.00359
4.2	0.07742	0.01536	0.00356
4.86667	0.04867	0.01046	0.0035
5.53333	0.01492	0.00342	0.00342
6.2	0	0	0.00332
6.86667	0	0	0.0032
7.53333	0	0	0.00307
8.2	0	0	0.00292
8.86667	0	0	0.00276
9.53333	0	0	0.00259
10.2	0	0	0.00241
10.86667	0	0	0.00224
11.53333	0	0	0.00207
12.2	0	0	0.0019
12.86667	0	0	0.00174
13.53333	0	0	0.00161
14.2	0	0	0.00147
14.86667	0	0	0.00135
15.53333	0	0	0.00128
16.2	0	0	0.00119
16.86667	0	0	0.00115
17.53333	0	0	0.00114
18.2	0	0	0.00114
18.86667	0	0	0.00117
19.53333	0	0	0.00125
20.2	0	0	0.00134
20.86667	0	0	0.00147
21.53333	0	0	0.00164
22.2	0	0	0.00184
22.86667	0	0	0.00209
23.53333	0	0	0.00237
24.2	0	0	0.00269
24.86667	0	0	0.00306
25.53333	0	0	0.00347
26.2	0	0	0.00391
26.86667	0	0	0.0044
27.53333	0	0	0.00494
28.2	0	0	0.00551
28.86667	0	0	0.00614
29.53333	0	0	0.00678
30.2	0	0	0.00747
30.86667	0	0	0.00821
31.53333	4.71989E-4	1.8541E-4	0.00892
32.2	0.00241	9.4904E-4	0.00967
32.86667	0.00587	0.00232	0.01046
33.53333	0.01089	0.00432	0.01121
34.2	0.01751	0.00697	0.01197
34.86667	0.02575	0.01027	0.01274
35.53333	0.03564	0.01426	0.01347
36.2	0.04722	0.01895	0.0142
36.86667	0.06052	0.02436	0.0149
37.53333	0.07557	0.03049	0.01558
38.2	0.09098	0.0368	0.01623
38.86667	0.09776	0.03964	0.01686
39.53333	0.09945	0.04042	0.01747
40.2	0.09741	0.03968	0.01806
40.86667	0.09219	0.03764	0.01863
41.53333	0.08407	0.0344	0.01919
42.2	0.07323	0.03003	0.01973
42.86667	0.05979	0.02456	0.02027
43.53333	0.04381	0.01804	0.02081
44.2	0.02536	0.01046	0.02134
44.86667	0.00447	0.00185	0.02187
45.53333	0	0	0.02239
46.2	0	0	0.02292
46.86667	0	0	0.02344
47.53333	8.27061E-4	3.44257E-4	0.02395
48.2	0.00421	0.00176	0.02444
48.86667	0.01024	0.00428	0.02492
49.53333	0.01897	0.00794	0.02536
50.2	0.03044	0.01275	0.02576
50.86667	0.04468	0.01875	0.02611
51.53333	0.06174	0.02594	0.02639
52.2	0.08166	0.03436	0.0266
52.86666	0.10448	0.04403	0.02674
53.53334	0.13024	0.05496	0.02677
54.2	0.15653	0.06615	0.02671
54.86666	0.16792	0.07106	0.02654
55.53334	0.17056	0.07227	0.02626
56.2	0.16681	0.07077	0.02586
56.86666	0.15763	0.06696	0.02535
57.53334	0.14354	0.06105	0.02472
58.2	0.12486	0.05317	0.02399
58.86666	0.10179	0.0434	0.02316
59.53334	0.0745	0.0318	0.02223
60.2	0.04307	0.0184	0.02122
60.86666	0.00758	0.00324	0.02015
61.53334	0	0	0.01901
62.2	0	0	0.01783
62.86666	0	0	0.01664
63.53334	0	0	0.01542
64.2	0	0	0.01421
64.86666	0	0	0.01303
65.53334	0	0	0.01185
66.2	0	0	0.01072
66.86666	0	0	0.00965
67.53334	0	0	0.00862
68.2	0	0	0.00766
68.86666	0	0	0.00677
69.53334	0	0	0.00595
70.2	0	0	0.00519
70.86666	0	0	0.0045
71.53334	0	0	0.00387
72.2	0	0	0.00331
72.86666	0	0	0.00282
73.53334	0	0	0.00238
74.2	0	0	0.00199
74.86666	0	0	0.00166
75.53334	0	0	0.00136
76.2	0	0	0.00111
76.86666	0	0	8.93411E-4
77.53334	0	0	7.07576E-4
78.2	0	0	5.48955E-4
78.86666	0	0	4.16388E-4
79.53334	0	0	3.07481E-4
80.2	0	0	2.19552E-4
80.86666	0	0	1.49985E-4
81.53334	0	0	9.63582E-5
82.2	0	0	5.64918E-5
82.86666	0	0	2.84662E-5
83.53334	0	0	1.06185E-5
84.2	0	0	1.52866E-6
84.86666	0	0	0
85.53334	0	0	0
86.2	0	0	0
86.86666	0	0	0
87.53334	0	0	0
88.2	0	0	0
88.86666	0	0	0
89.53334	0	0	0
90.2	0	0	0
90.86666	0	0	0
91.53334	0	0	0
92.2	0	0	0
92.86666	0	0	0
93.53334	0	0	0
94.2	0	0	0
94.86666	0	0	0
95.53334	0	0	0
96.2	0	0	0
96.86666	0	0	0
97.53334	0	0	0
98.2	0	0	0
98.86666	0	0	0
99.53334	0	0	0
100.2	0	0	0
100.86666	0	0	0
101.53334	0	0	0
102.2	0	0	0
102.86666	0	0	0
103.53334	0	0	0
104.2	0	0	0
104.86666	0	0	0
105.53334	0	0	0
106.2	0	0	0
106.86666	0	0	0
107.53334	0	0	0
108.2	0	0	0
108.86666	0	0	0
109.53334	0	0	0
110.2	0	0	0
110.86666	0	0	0
111.53334	0	0	0
112.2	0	0	0
112.86666	0	0	0
113.53334	0	0	0
114.2	0	0	0
114.86666	0	0	0
115.53334	0	0	0
116.2	0	0	0
116.86667	0	0	0
117.53333	0	0	0
118.2	0	0	0
118.86667	0	0	0
119.53333	0	0	0
120.2	0	0	0
120.86667	0	0	0
121.53333	0	0	0
122.2	0	0	0
122.86667	0	0	0
123.53333	0	0	0
124.2	0	0	0
124.86667	0	0	0
125.53333	0	0	0
126.2	0	0	0
126.86667	0	0	0
127.53333	0	0	0
128.2	0	0	0
128.86667	0	0	0
129.53333	0	0	0
130.2	0	0	0
130.86667	0	0	0
131.53333	0	0	0
132.2	0	0	0
132.86667	0	0	0
133.53333	0	0	0
134.2	0	0	0
134.86667	0	0	0
135.53333	0	0	0
136.2	0	0	0
136.86667	0	0	0
137.53333	0	0	0
138.2	0	0	0
138.86667	0	0	0
139.53333	0	0	0
140.2	0	0	0
140.86667	0	0	0
141.53333	0	0	0
142.2	0	0	0
142.86667	0	0	0
143.53333	0	0	0
144.2	0	0	0
144.86667	0	0	0
145.53333	0	0	0
146.2	0	0	0
146.86667	0	0	0
147.53333	0	0	0
148.2	0	0	0
148.86667	0	0	0
149.53333	0	0	0
150.2	0	0	0
150.86667	0	0	0
151.53333	0	0	0
152.2	0	0	0
152.86667	0	0	0
153.53333	0	0	0
154.2	0	0	0
154.86667	0	0	0
155.53333	0	0	0
156.2	0	0	0
156.86667	0	0	0
157.53333	0	0	0
158.2	0	0	0
158.86667	0	0	0
159.53333	0	0	0
160.2	0	0	0
160.86667	0	0	0
161.53333	0	0	0
162.2	0	0	0
162.86667	0	0	0
163.53333	0	0	0
164.2	0	0	0
164.86667	0	0	0
165.53333	0	0	0
166.2	0	0	0
166.86667	0	0	0
167.53333	0	0	0
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